Development and Test of a Profilometer Based on a Low-Cost White-Light Bench Microscope with a Linear Sensor

AuthID
 P-007-EFH
3
Author(s)
Fernandes, AG
·
1
Editor(s)
Ottevaere H.DeWolf P.Wiersma D.S.
Document Type
Proceedings Paper
Year published
2005
Published
in Proceedings of SPIE - The International Society for Optical Engineering, ISSN: 0277-786X
Volume: 5858, Pages: 1-8
Conference
Nano- and Micro-Metrology, Date: 16 June 2005 through 17 June 2005, Location: Munich, Sponsors: SPIE Europe
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Publication Identifiers
Scopus: 2-s2.0-28844441259
Source Identifiers
ISSN: 0277-786X
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