Ain Thin Films Formed by Time Modulated Low Temperature Reactive Magnetron Sputtering and Their Properties

AuthID
 P-007-F19
6
Author(s)
Afanasjev, AP
·
Gudovskikh, AS
·
Luchinin, VV
·
Sazanov, AP
·
Terukov, EI
·
Document Type
Article
Year published
2000
Published
in Journal of Wide Bandgap Materials, ISSN: 1524-511X
Volume: 8, Issue: 2, Pages: 105-114
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Publication Identifiers
Scopus: 2-s2.0-3242717198
Source Identifiers
ISSN: 1524-511X
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