Comparison of Measured and Calculated Dose for Plasma Source Ion Implantation into 3-D Objects

AuthID
 P-007-F4H
5
Author(s)
Mandl, S
·
Brutscher, J
·
Gunzel, R
·
Moller, W
Document Type
Article
Year published
1997
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 127, Pages: 996-999 (4)
Conference
10Th International Conference on Ion Beam Modification of Materials (Ibmm-96), Date: SEP 01-06, 1996, Location: ALBUQUERQUE, NM
Indexing
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-3342993508
Wos: WOS:A1997XG60500219
Source Identifiers
ISSN: 0168-583X
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