Effect of A-Sic:h Film Composition on the Performance of Large Area Optical Sensors

AuthID
 P-007-HSP
5
Author(s)
Schubert, M
Document Type
Proceedings Paper
Year published
2001
Published
in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 685, Pages: 204-209
Conference
2001 Mrs Spring Meeting, Date: 16 April 2001 through 20 April 2001, Location: San Francisco, CA
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-34249904666
Source Identifiers
ISSN: 0272-9172
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