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A Novel Soi-Mems "Micro-Swing" Time-Accelerometer Operating in Two Time-Based Transduction Modes for High Sensitivity and Extended Range

AuthID
P-007-ZXS

Author(s)

Rajaraman, V

Hau, BS

Rocha, LA

Dias, RA

Makinwa, KAA

Dekker, R

Document Type

Proceedings Paper

Year published

2011

Published

in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Pages: 2066-2069

Conference

2011 16Th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11, Date: 5 June 2011 through 9 June 2011, Location: Beijing

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Publication Identifiers

DOI: 10.1109/transducers.2011.5969225

Scopus: 2-s2.0-80052126623

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A Novel Soi-Mems "Micro-Swing" Time-Accelerometer Operating in Two Time-Based Transduction Modes for High Sensitivity and Extended Range

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A Novel Soi-Mems "Micro-Swing" Time-Accelerometer Operating in Two Time-Based Transduction Modes for High Sensitivity and Extended Range

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