Reliability and Stability of Thin-Film Amorphous Silicon Mems on Glass Substrates

AuthID
 P-008-0EW
3
Author(s)
Document Type
Proceedings Paper
Year published
2011
Published
in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 1299, Pages: 85-90
Conference
2010 Mrs Fall Meeting, Date: 29 November 2010 through 3 December 2010, Location: Boston, MA
Indexing
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-80053176686
Source Identifiers
ISSN: 0272-9172
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