Damage Formation in Gan Under Medium Energy Range Implantation of Rare Earth Ions: A Combined Tem, Xrd and Rbs/C Investigation

AuthID
P-008-1PY
7
Author(s)
Lacroix, B
·
Leclerc, S
·
Declemy, A
·
Document Type
Proceedings Paper
Year published
2012
Published
in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 1342, Pages: 27-32
Conference
2011 Mrs Spring Meeting, Date: 25 April 2011 through 29 April 2011, Location: San Francisco, CA
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Publication Identifiers
Scopus: 2-s2.0-84455209588
Source Identifiers
ISSN: 0272-9172
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