Influence of Substrate Bias Voltage on the Physical, Electrical and Dielectric Properties of Rf Magnetron Sputtered Tio 2 Films

AuthID
 P-008-2Z3
6
Author(s)
Kondaiah, P
·
Sekhar, MC
·
Uthanna, S
·
Elangovan, E
Document Type
Proceedings Paper
Year published
2012
Published
in IOP Conference Series: Materials Science and Engineering, ISSN: 1757-8981
Volume: 30, Issue: 1, Pages: 012005
Conference
European Materials Research Society (Emrs) Fall Meeting 2011 Symposium K: Solution-Derived Electronic-Oxide Films Nanostructures and Patterning, from Materials to Devices, Date: 19 September 2011 through 23 September 2011, Location: Warsaw
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Publication Identifiers
Scopus: 2-s2.0-84858213569
Source Identifiers
ISSN: 1757-8981
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