Sol-Gel Chemistry and Atomic Layer Deposition

AuthID
 P-008-E1Z
3
Author(s)
Clavel, G
·
Document Type
Book Chapter
Year published
2012
Published
in Atomic Layer Deposition of Nanostructured Materials
Pages: 61-82
Indexing
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Publication Identifiers
Scopus: 2-s2.0-84884082363
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