The Effect of Argon Plasma Treatment on the Permeation Barrier Properties of Silicon Nitride Layers

AuthID
 P-008-FG5
7
Author(s)
Geffroy, B
·
Bonnassieux, Y
·
Bouree, JE
Document Type
Article
Year published
2013
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 235, Pages: 361-366 (6)
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Publication Identifiers
Scopus: 2-s2.0-84886239118
Wos: WOS:000329596100046
Source Identifiers
ISSN: 0257-8972
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