Synthesis of Cobalt Silicide on Porous Silicon by High Dose Ion Implantation

AuthID
P-000-VQZ
8
Author(s)
Paszti, F
·
Kotai, E
·
Vazsonyi, E
·
da Silva, MR
·
da Silva, MF
·
1
Editor(s)
Bernas H.Heinig K.H.Williams J.Lindner J.K.N.
Document Type
Article
Year published
2001
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 178, Issue: 1-4, Pages: 283-286 (4)
Conference
E-Mrs Spring Meeting on Materials Science with Ion Beams, Date: MAY 30-JUN 02, 2000, Location: STRASBOURG, FRANCE, Sponsors: E-MRS
Indexing
Publication Identifiers
Scopus: 2-s2.0-0035335856
Wos: WOS:000169403700056
Source Identifiers
ISSN: 0168-583X
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