Using Dynamic Voltage Drive in a Parallel-Plate Electrostatic Actuator for Full-Gap Travel Range and Positioning

AuthID
 P-008-PDJ
3
Author(s)
Document Type
Article
Year published
2006
Published
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Volume: 15, Issue: 1, Pages: 69-83 (15)
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Publication Identifiers
Scopus: 2-s2.0-32244441217
Wos: WOS:000235453000007
Source Identifiers
ISSN: 1057-7157
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