Analysis and Analytical Modeling of Static Pull-In with Application to Mems-Based Voltage Reference and Process Monitoring

AuthID
 P-008-PDR
3
Author(s)
Document Type
Article
Year published
2004
Published
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Volume: 13, Issue: 2, Pages: 342-354 (13)
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Publication Identifiers
Scopus: 2-s2.0-1942500862
Wos: WOS:000220759300021
Source Identifiers
ISSN: 1057-7157
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