in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ISSN: 1084-6999
Pages: 249-252
Conference
17Th Ieee International Conference on Micro Electro Mechanical Systems (Mems): Maastricht Mems 2004 Technical Digest, Date: 25 January 2004 through 29 January 2004, Location: Maastricht, Sponsors: IEEE, Robotics and Automation Society
