Mechanical Spectrum Analyzer in Silicon Using Micromachined Accelerometers with Time-Varying Electrostatic Feedback

AuthID
 P-008-PE2
4
Author(s)
De Graaf, G
·
Document Type
Proceedings Paper
Year published
2003
Published
in Conference Record - IEEE Instrumentation and Measurement Technology Conference
Volume: 2, Pages: 1197-1201
Conference
Proceedings of the 20Th Ieee Information and Measurement Technology Conference, Date: 20 May 2003 through 22 May 2003, Location: Vail, CO, Sponsors: IEEE Instrumentation and Measurment Society
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0038159359
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