The Pull-In of Symmetrically and Asymmetrically Driven Microstructures and the Use in Dc Voltage References

AuthID
P-008-PE9
Document Type
Proceedings Paper
Year published
2002
Published
in Conference Record - IEEE Instrumentation and Measurement Technology Conference
Volume: 1, Pages: 759-764
Conference
19Th Ieee Instrumentation and Measurement Technology Conference, Date: 21 May 2002 through 23 May 2002, Location: Anchorage, AK, Sponsors: IEEE
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Publication Identifiers
Scopus: 2-s2.0-0036047101
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