Composition of Nitac Films on Si Using Neural Networks Analysis of Elastic Backscattering Data

AuthID
 P-000-W16
2
Author(s)
Document Type
Article
Year published
2001
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 174, Issue: 3, Pages: 367-372 (6)
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Publication Identifiers
Scopus: 2-s2.0-0035311198
Wos: WOS:000167516600016
Source Identifiers
ISSN: 0168-583X
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