Closed-Chamber Cvd - a New Method for Preparation of Group-Iv Thin Films for Large Area Electronics

AuthID
P-000-WD2
4
Author(s)
Tzolov, M
·
Document Type
Article
Year published
2001
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 383, Issue: 1-2, Pages: 206-208 (3)
Conference
3Rd Symposium O on Thin Film Materials for Large Area Electronics of the E-Mrs 2000 Spring Meeting, Date: MAY 30-JUN 02, 2000, Location: STRASBOURG, FRANCE, Sponsors: French Minist Res, Balzers AG, Unaxis, Jobin Yvon
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Publication Identifiers
Scopus: 2-s2.0-0035247353
Wos: WOS:000167378300051
Source Identifiers
ISSN: 0040-6090
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