A New Method to Build a High-Voltage Pulse Supply Using Only Semiconductor Switches for Plasma-Immersion Ion Implantation

AuthID
 P-000-WDS
3
Author(s)
Document Type
Article
Year published
2001
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 136, Issue: 1-3, Pages: 51-54 (4)
Conference
5Th International Workshop on Plasma-Based Ion Implantation (Pbii-99), Date: DEC 13-16, 1999, Location: SEIKA, JAPAN, Sponsors: Sci & Technol Agcy, Japan Int Sci & Technol Exchange Ctr, Osaka Natl Res Inst
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Publication Identifiers
Scopus: 2-s2.0-0035253905
Wos: WOS:000166464900012
Source Identifiers
ISSN: 0257-8972
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