in DEFECTS AND DIFFUSION IN SILICON PROCESSING in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 469, Pages: 407-412 (6)
Conference
Symposium on Defects and Diffusion in Silicon Processing, Date: APR 01-04, 1997, Location: SAN FRANCISCO, CA, Sponsors: Mat Res Soc, Bell Labs, Lucent Technol, CNR, Lawrence Livermore Natl Lab, Philips Res Labs, SEMATECH, SGS Thomson Microelectr, Technol Modelling Associates