Iridium Silicide Formation by Rapid Thermal Annealing

AuthID
 P-008-YDX
6
Author(s)
Rodriguez, T
·
Wolters, H
·
Almendra, A
·
Sanz Maudes, J
·
Da Silva, MF
·
1
Editor(s)
Dawson Ralph L.Appelbaum Ami
Document Type
Proceedings Paper
Year published
1994
Published
in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 299, Pages: 313-317
Conference
Proceedings of the 1993 Spring Meeting of the Materials Research Society, Date: 14 April 1993 through 16 April 1993, Location: San Francisco, CA, USA, Sponsors: Aixtron;Rockwell International;Semi-Conductor Devices
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0027962147
Source Identifiers
ISSN: 0272-9172
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