Complex Model for Plasma-Enhanced Heteroepitaxial Deposition of A2B6 Semiconductor Compounds Using Moc

AuthID
 P-009-2K2
5
Author(s)
Ershov, SN
·
Gurllev, BV
·
Ozerov, AB
Document Type
Article
Year published
1992
Published
in Semiconductor Science and Technology, ISSN: 0268-1242
Volume: 7, Issue: 2, Pages: 245-254
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Publication Identifiers
Scopus: 2-s2.0-0026820569
Source Identifiers
ISSN: 0268-1242
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