Rbs/Simulated Annealing and Ftir Characterisation of Bcn Films Deposited by Dual Cathode Magnetron Sputtering

AuthID
P-009-2V0
5
Author(s)
Kusano, Y
·
Hutchings, IM
2
Editor(s)
Duggan, JL; Morgan, IL
Document Type
Proceedings Paper
Year published
1999
Published
in APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, PTS 1 AND 2 in AIP CONFERENCE PROCEEDINGS, ISSN: 0094-243X
Volume: 475, Pages: 504-507 (2)
Conference
15Th International Conference on the Application of Accelerators in Research and Industry, Date: NOV 04-07, 1998, Location: DENTON, TX, Sponsors: US DOE, Natl Sci Fdn, Univ N Texas, Host: UNIV N TEXAS
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Publication Identifiers
Wos: WOS:000081503200123
Source Identifiers
ISSN: 0094-243X
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