Thin-Film Microelectromechanical Devices on Large-Area Substrates

AuthID
 P-000-XQ3
5
Author(s)
·
Boucinha, M
·
4
Editor(s)
Bonnaud, O; MohammedBrahim, T; Strunk, HP; Werner, JH
Document Type
Article
Year published
2001
Published
in POLYCRYSTALLINE SEMICONDUCTORS IV MATERIALS, TECHNOLOGIES AND LARGE AREA ELECTRONICS in Solid State Phenomena, ISSN: 1012-0394
Volume: 80-81, Pages: 429-439 (11)
Conference
6Th International Conference on Polycrystalline Semiconductors, Date: SEP 03-07, 2000, Location: ST MALO, FRANCE, Sponsors: CNRS, Reg Bretagne, Conseil Gen Vilaine, Univ Rennes 1, STMicroelectr Rennes, STMicroelectr Tours, SOPRA, KarlSuss
Indexing
Wos®
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0034825691
Wos: WOS:000171369300061
Source Identifiers
ISSN: 1012-0394
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