Influence of Sputtering Power and the Substrate-Target Distance on the Properties of Zro2 Films Prepared by Rf Reactive Sputtering

AuthID
P-000-YDR
5
Author(s)
Document Type
Article
Year published
2000
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 377, Pages: 557-561 (5)
Conference
27Th International Conference on Metallurgical Coatings and Thin Films, Date: APR 10-14, 2000, Location: SAN DIEGO, CALIFORNIA, Sponsors: Amer Vacuum Soc, Adv Surface Engn Div
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Publication Identifiers
Scopus: 2-s2.0-0034502867
Wos: WOS:000166024600094
Source Identifiers
ISSN: 0040-6090
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