Influence of Low Energy Argon Plasma Treatment on the Moisture Barrier Performance of Hot Wire-Cvd Grown Sinx Multilayers

AuthID
 P-009-MA7
7
Author(s)
Bonnassieux, Y
·
Bouree, JE
Document Type
Article
Year published
2014
Published
in JAPANESE JOURNAL OF APPLIED PHYSICS, ISSN: 0021-4922
Volume: 53, Issue: 5, Pages: 05FM05 (5)
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Publication Identifiers
Scopus: 2-s2.0-84903315834
Wos: WOS:000338316200107
Source Identifiers
ISSN: 0021-4922
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