Buried Word Line Planarization and Roughness Control for Tunnel Junction Magnetic Random Access Memory Switching

AuthID
P-001-067
5
Author(s)
Sousa, RC
·
Bernardo, J
·
Document Type
Article
Year published
2000
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 87, Issue: 9, Pages: 6382-6384 (3)
Conference
44Th Annual Conference on Magnetism and Magnetic Materials, Date: NOV 15-18, 1999, Location: SAN JOSE, CA, Sponsors: Amer Inst Phys, Magnet Soc Inst Elect & Electr Engineers, Minerals Met & Mat Soc, Amer Soc Testing & Mat, USN Off Res, Amer Ceram Soc, Amer Phys Soc
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Publication Identifiers
Scopus: 2-s2.0-0001051786
Wos: WOS:000086728800160
Source Identifiers
ISSN: 0021-8979
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