Silicon Film Deposition on Crystalline, Sintered and Powder Substrates Using an Inline Optical Processing Cvd System

AuthID
P-00A-3HY
4
Author(s)
Augusto, A
·
Serra, F
·
2
Editor(s)
Pizzini, S; Kissinger, G
Document Type
Proceedings Paper
Year published
2014
Published
in PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 11, NO 11-12 in Physica Status Solidi C-Current Topics in Solid State Physics, ISSN: 1862-6351
Volume: 11, Issue: 11-12, Pages: 1657-1660 (4)
Conference
European-Materials-Research-Society Spring Meeting / Symposium X on Materials Research for Group Iv Semiconductors - Growth, Characterization, and Technological Developments, Date: JUL 26-30, 2014, Location: Lille, FRANCE, Sponsors: European Mat Res Soc
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Publication Identifiers
Scopus: 2-s2.0-84921019393
Wos: WOS:000360173700025
Source Identifiers
ISSN: 1862-6351
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