Role of the Gas Temperature and Power to Gas Flow Ratio on Powder Formation and Properties of Films Grown by the Pecvd Technique

AuthID
P-001-117
5
Author(s)
Domingues, A
·
Document Type
Article
Year published
2000
Published
in MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, ISSN: 0921-5107
Volume: 69, Pages: 272-277 (6)
Conference
Spring Meeting of the European-Materials-Research-Society, Date: JUN 01-04, 1999, Location: STRASBOURG, FRANCE, Sponsors: European Mat Res Soc
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Publication Identifiers
Scopus: 2-s2.0-0033895960
Wos: WOS:000085591900050
Source Identifiers
ISSN: 0921-5107
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