Chemical Kinetics and Energy Transfer in Moderate Pressure H-2 Plasmas Used in Diamond Mpacvd Processes

AuthID
 P-001-3SE
4
Author(s)
Gicquel, A
·
Capitelli, M
·
Document Type
Article
Year published
1999
Published
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 8, Issue: 3, Pages: 494-512 (19)
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-0032643964
Wos: WOS:000082320500022
Source Identifiers
ISSN: 0963-0252
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