Characterization of Ruo2 Films Prepared by Rf Reactive Magnetron Sputtering

AuthID
P-001-4C3
2
Author(s)
Document Type
Article
Year published
1999
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 147, Issue: 1-4, Pages: 94-100 (7)
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Publication Identifiers
Scopus: 2-s2.0-0032626189
Wos: WOS:000080821900014
Source Identifiers
ISSN: 0169-4332
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