Kinetic Model of a Low-Pressure Microwave Discharge in O-2-N-2 Including the Effects of O- Ions on the Characteristics for Plasma Maintenance

AuthID
 P-001-57V
2
Author(s)
Document Type
Article
Year published
1999
Published
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 8, Issue: 1, Pages: 110-124 (15)
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Publication Identifiers
Scopus: 2-s2.0-0033075482
Wos: WOS:000078887600015
Source Identifiers
ISSN: 0963-0252
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