Characterization of Ruo2 Films Prepared by Rf Reactive Magnetron Sputtering

AuthID
 P-001-5MM
2
Author(s)
4
Editor(s)
Jones, RE; Schwartz, RW; Summerfelt, SR; Yoo, IK
Document Type
Proceedings Paper
Year published
1999
Published
in FERROELECTRIC THIN FILMS VII in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 541, Pages: 141-146 (6)
Conference
Symposium on Ferroelectric Thin Films Vii, Date: NOV 30-DEC 03, 1998, Location: BOSTON, MA, Sponsors: Mat Res Soc
Indexing
Wos®
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0032592381
Wos: WOS:000081716100019
Source Identifiers
ISSN: 0272-9172
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