Laser Assisted Chemical Vapour Deposition of Silicon Oxide Layers

AuthID
P-001-6NF
3
Author(s)
Paiva, P
·
Madelino, F
·
Document Type
Article
Year published
1998
Published
in JOURNAL OF LUMINESCENCE, ISSN: 0022-2313
Volume: 80, Issue: 1-4, Pages: 141-145 (5)
Conference
Symposium on Light Emission from Silicon - Procress Towards Si-Based Optoelectronics at the Spring Meeting of the European-Materials-Research-Society, Date: JUN 16-19, 1998, Location: STRASBOURG, FRANCE, Sponsors: DCA Instruments, High Voltage Engn Europa BV, CNR IMETEM Catania, GNSM-CNR Roma
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Publication Identifiers
Scopus: 2-s2.0-0001571480
Wos: WOS:000079227800022
Source Identifiers
ISSN: 0022-2313
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