Structural Characterization of Mu C-Si : H Films Produced by Rf Magnetron Sputtering

AuthID
 P-001-7DE
4
Author(s)
Document Type
Article
Year published
1998
Published
in MICROELECTRONIC ENGINEERING, ISSN: 0167-9317
Volume: 43-4, Pages: 627-634 (8)
Conference
2Nd International Conference on Low Dimensional Structures and Devices, Date: MAY 19-21, 1997, Location: LISBON, PORTUGAL
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-0000576844
Wos: WOS:000075867000087
Source Identifiers
ISSN: 0167-9317
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