Self-Consistent Kinetic Model of Low-Pressure N-2-H-2 Flowing Discharges: Ii. Surface Processes and Densitites of N, H, Nh3 Species

AuthID
 P-001-7DY
4
Author(s)
Gordiets, B
·
Ricard, A
Document Type
Article
Year published
1998
Published
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 7, Issue: 3, Pages: 379-388 (10)
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Wos®
Scopus®
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Publication Identifiers
Scopus: 2-s2.0-0032139172
Wos: WOS:000075608000015
Source Identifiers
ISSN: 0963-0252
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