Effects of Nonlocal Electron Kinetics and Transition from Alpha to Gamma Regime in an Rf Capacitive Discharge in Nitrogen

AuthID
 P-001-869
4
Author(s)
Stoykova, E
·
Bachev, K
·
Zhelyazkov, I
Document Type
Article
Year published
1998
Published
in IEEE TRANSACTIONS ON PLASMA SCIENCE, ISSN: 0093-3813
Volume: 26, Issue: 2, Pages: 167-174 (8)
Indexing
Wos®
Scopus®
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Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-0032047013
Wos: WOS:000073495500007
Source Identifiers
ISSN: 0093-3813
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