Lattice Site Location and Annealing Behavior of W Implanted Tio2

AuthID
P-001-8E3
5
Author(s)
Document Type
Article
Year published
1998
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 136, Pages: 442-446 (5)
Conference
13Th International Conference on Ion Beam Analysis (Iba-13), Date: JUL 27-AUG 01, 1997, Location: LISBON, PORTUGAL
Indexing
Publication Identifiers
Scopus: 2-s2.0-0032020996
Wos: WOS:000074380400078
Source Identifiers
ISSN: 0168-583X
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