Publications

Alpha-Elastic Recoil Detection Analysis of the Energy Distribution of Oxygen Ions Implanted into Silicon with Plasma Immersion Ion Implantation

AuthID
P-001-BEG

Author(s)

Barradas, NP

Maas, AJH

Mandl, S

Gunzel, R

Document Type

Article

Year published

1997

Published

in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979

Volume: 81, Issue: 10, Pages: 6642-6650 (9)

Indexing

Wos^®

Scopus^®

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Google Scholar^®

Publication Identifiers

DOI: 10.1063/1.365203

Scopus: 2-s2.0-0001402621

Wos: WOS:A1997WZ57500012

Source Identifiers

ISSN: 0021-8979

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Alpha-Elastic Recoil Detection Analysis of the Energy Distribution of Oxygen Ions Implanted into Silicon with Plasma Immersion Ion Implantation

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Alpha-Elastic Recoil Detection Analysis of the Energy Distribution of Oxygen Ions Implanted into Silicon with Plasma Immersion Ion Implantation

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