Etching of Amorphous Al2O3 Produced by Ion Implantation

AuthID
P-001-BJ3
6
Author(s)
Joslin, DL
·
daSilva, MF
·
Document Type
Article
Year published
1997
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 127, Pages: 596-598 (3)
Conference
10Th International Conference on Ion Beam Modification of Materials (Ibmm-96), Date: SEP 01-06, 1996, Location: ALBUQUERQUE, NM
Indexing
Publication Identifiers
Scopus: 2-s2.0-0031547718
Wos: WOS:A1997XG60500135
Source Identifiers
ISSN: 0168-583X
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