Growth of Tic Films by Thermal Laser-Assisted Chemical Vapour Deposition

AuthID
 P-001-BZS
2
Author(s)
Parames, MLF
·
1
Editor(s)
Afonso C.N.Matthias E.Szorenyi T.
Document Type
Article
Year published
1997
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 109, Pages: 554-558 (5)
Conference
Proceedings of Symposium H on Laser Processing of Surfaces and Thin Films of the 1996 E-Mrs Spring Conference, Date: JUN 04-07, 1996, Location: STRASBOURG, FRANCE, Sponsors: European Mat Res Soc
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Publication Identifiers
Scopus: 2-s2.0-0031077428
Wos: WOS:A1997WK22700106
Source Identifiers
ISSN: 0169-4332
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