Kinetics of Pt Silicide Formation Studied by Spectral Ellipsometry

AuthID
 P-001-CX7
9
Author(s)
Dittrich, A
·
Zhou, SM
·
Hundhausen, M
·
Ley, L
·
Chen, LY
·
Woerle, D
·
Manke, C
·
Schulz, M
4
Editor(s)
Riley, TJ; Gelpey, JC; Roozeboom, F; Saito, S
Document Type
Proceedings Paper
Year published
1997
Published
in RAPID THERMAL AND INTEGRATED PROCESSING VI in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 470, Pages: 259-264 (6)
Conference
Symposium on Rapid Thermal and Integrated Processing Vi, at the 1997 Mrs Spring Meeting, Date: APR 01-04, 1997, Location: SAN FRANCISCO, CA, Sponsors: Mat Res Soc
Indexing
Wos®
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0031355292
Wos: WOS:000072112400034
Source Identifiers
ISSN: 0272-9172
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