Stress Analysis of Titanium Dioxide Films by Raman Scattering and X-Ray Diffraction Methods

AuthID
P-001-D0A
2
Author(s)
4
Editor(s)
Gerberich, WW; Gao, HJ; Sundgren, JE; Baker, SP
Document Type
Proceedings Paper
Year published
1997
Published
in THIN FILMS: STRESSES AND MECHANICAL PROPERTIES VI in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 436, Pages: 523-528 (4)
Conference
Symposium on Thin Films - Stresses and Mechanical Properties Vi, at the 1996 Mrs Spring Meeting, Date: APR 08-12, 1996, Location: SAN FRANCISCO, CA, Sponsors: Mat Res Soc, Mat Test Syst Inc, Hysitron Inc, US DOE
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Publication Identifiers
Wos: WOS:A1997BH29Z00081
Source Identifiers
ISSN: 0272-9172
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