The Ultimate Vacuum Pressure and the Characteristics of Sputtered Coatings

AuthID
 P-001-D7Q
4
Author(s)
Ramos, F
·
Document Type
Article
Year published
1996
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 290, Pages: 238-242 (5)
Conference
23Rd International Conference on Metallurgical Coatings and Thin Films, Date: APR 22-26, 1996, Location: SAN DIEGO, CA, Sponsors: Amer Vacuum Soc, Vacuum Met & Thin Films Div
Indexing
Wos®
Scopus®
Crossref®6
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-0030397794
Wos: WOS:A1996WB81900048
Source Identifiers
ISSN: 0040-6090
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