Particle Agglomeration Study in Rf Silane Plasmas: In Situ Study by Polarization-Sensitive Laser Light Scattering

AuthID
P-001-DVN
10
Author(s)
Courteille, C
·
Hollenstein, C
·
Dorier, JL
·
Gay, P
·
Howling, AA
·
Bertran, E
·
Viera, G
·
Macarico, A
Document Type
Article
Year published
1996
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 80, Issue: 4, Pages: 2069-2078 (10)
Indexing
Publication Identifiers
Scopus: 2-s2.0-0001314405
Wos: WOS:A1996VD53200017
Source Identifiers
ISSN: 0021-8979
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