Structure Effect on Electrical Properties of Ito Films Prepared by Rf Reactive Magnetron Sputtering

AuthID
P-001-FNQ
2
Author(s)
6
Editor(s)
Ginley, D; Catalano, A; Schock, HW; Eberspacher, C; Petersen, TM; Wada, T
Document Type
Proceedings Paper
Year published
1996
Published
in THIN FILMS FOR PHOTOVOLTAIC AND RELATED DEVICE APPLICATIONS in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 426, Pages: 431-436 (6)
Conference
Symposium on Thin Films for Photovoltaic and Related Device Applications, at the 1996 Mrs Spring Meeting, Date: APR 08-11, 1996, Location: SAN FRANCISCO, CA, Sponsors: Mat Res Soc
Indexing
Publication Identifiers
Scopus: 2-s2.0-0030405308
Wos: WOS:A1996BG81U00059
Source Identifiers
ISSN: 0272-9172
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