Fast Eedf Probe Measurement In Surface-Wave Discharges Using A Dc Coupled Stepped Signal

AuthID
 P-001-HC7
1
Author(s)
Document Type
Article
Year published
1995
Published
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 4, Issue: 1, Pages: 86-93 (8)
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Publication Identifiers
Scopus: 2-s2.0-0029253277
Wos: WOS:A1995QX54800009
Source Identifiers
ISSN: 0963-0252
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