He-Rbs, He-Erda and Heavy Ion-Erda Analysis of Si/Ta 70 Å/Cofe 35 Å/Hfalox/Cofe 35 Å/Ta 30 Å Systems

AuthID
P-00F-H71
7
Author(s)
Matias, V
·
Sequeira, AD
·
Kreissig, U
·
Wang, JU
·
4
Editor(s)
Vizkelethy,G;McDaniel,FD;Thevuthasan,S;Tesmer,JR
Document Type
Proceedings Paper
Year published
2004
Published
in Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 219-220, Issue: 1-4, Pages: 742-746
Conference
Proceedings of the Sixteenth International Conference on Ion, Date: 29 June 2003 through 4 July 2003, Location: Albuquerque, NM.
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Publication Identifiers
Scopus: 2-s2.0-2342462247
Source Identifiers
ISSN: 0168-583X
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