Interdiffusion in Amorphous Si/Sic Multilayers

AuthID
 P-00F-MZ9
6
Author(s)
Kolodzey, J
·
Hanesch, P
·
Fischer, T
·
Zorn, G
·
Gobel, H
Document Type
Article
Year published
1992
Published
in Materials Science and Engineering B, ISSN: 0921-5107
Volume: 11, Issue: 1-4, Pages: 43-46
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0026680969
Source Identifiers
ISSN: 0921-5107
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