Luminescence Properties of Silicon Oxynitride Films

AuthID
P-00F-NBM
5
Author(s)
Fischer, T
·
Muschik, T
·
Kovalev, D
·
Koch, F
Document Type
Proceedings Paper
Year published
1995
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 358, Pages: 851-856
Conference
Proceedings of the 1994 Mrs Fall Meeting, Date: 28 November 1994 through 30 November 1994, Location: Boston, MA, USA, Sponsors: Army Research Office;Oak Ridge National Laboratory;Office of Naval Research
Indexing
Publication Identifiers
Scopus: 2-s2.0-0029224527
Source Identifiers
ISSN: 0272-9172
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